Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

Transparent electrodes are a core component for transparent electron devices, photoelectric devices, and advanced displays. In this work, we fabricate fully-transparent, highly-conductive Al-doped ZnO (AZO) films using an atomic layer deposition (ALD) system method of repeatedly stacking ZnO and Al&...

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Bibliographic Details
Main Authors: Kai Zhao, Jingye Xie, Yudi Zhao, Dedong Han, Yi Wang, Bin Liu, Junchen Dong
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Nanomaterials
Subjects:
transparent electrodes
atomic layer deposition process
Al-doped ZnO films
thin film transistors
Online Access:https://www.mdpi.com/2079-4991/12/1/172

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https://www.mdpi.com/2079-4991/12/1/172

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