Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy
In this paper, the THz emission properties from Si wafers with different surface conditions and doping conditions have been concluded, which show the potential application of LTEM on surface estimation
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2022-11-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-022-01033-x |