Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System
Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly important role in active structured light systems. However, the initial phase error of the structured light generated by a scanning micromirror seriously affects the accuracy of the corresponding system. This pa...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/3/561 |