CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub>
The consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented.
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Online Access: | https://doklady.bsuir.by/jour/article/view/121 |
| _version_ | 1797881209268731904 |
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| author | V. A. Zelenin |
| author_facet | V. A. Zelenin |
| author_sort | V. A. Zelenin |
| collection | DOAJ |
| description | The consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented. |
| first_indexed | 2024-04-10T03:16:25Z |
| format | Article |
| id | doaj.art-440b6f4871e94f51845b9f3674143bb6 |
| institution | Directory Open Access Journal |
| issn | 1729-7648 |
| language | Russian |
| last_indexed | 2024-04-10T03:16:25Z |
| publishDate | 2019-06-01 |
| publisher | Educational institution «Belarusian State University of Informatics and Radioelectronics» |
| record_format | Article |
| series | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| spelling | doaj.art-440b6f4871e94f51845b9f3674143bb62023-03-13T07:33:10ZrusEducational institution «Belarusian State University of Informatics and Radioelectronics»Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki1729-76482019-06-01083743120CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub>V. A. Zelenin0Физико-технический институт НАН БеларусиThe consideration is made of the ways leading to increasing the control of residual stresses in structures such as silicon dioxide-monocrystal silicon substrate. The results concerning the determination of the level of residual stresses in structures Si-SiO2 are presented.https://doklady.bsuir.by/jour/article/view/121 |
| spellingShingle | V. A. Zelenin CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| title | CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_full | CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_fullStr | CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_full_unstemmed | CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_short | CONTROL OF RESIDUAL STRESSES IN STRUCTURES SI-SIO<sub>2</sub> |
| title_sort | control of residual stresses in structures si sio sub 2 sub |
| url | https://doklady.bsuir.by/jour/article/view/121 |
| work_keys_str_mv | AT vazelenin controlofresidualstressesinstructuressisiosub2sub |