Application of linear iterative methods for the proximity effect correction in electron beam lithography
The Jacobi linear iterative method and weight Jacobi method (WJM) are introduced for solving the large-scale linear problem in the proximity effect correction (PEC) of electron beam lithography. Based on the discussion of PEC physics, a symmetrical and positive defined proximity interaction matrix i...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2023-05-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0147036 |