Bias-voltage effect on the TiN nanoparticle injection into magnetron sputtered CrN thin films towards nc-TiN/nc-CrN composites
The formation of a nanocomposite structure is thermodynamically driven by spinodal decomposition in at least two phases. With respect to the suppression of solid solution formation, artificial nc-TiN/nc-CrN composites were deposited using a novel hybrid-process, in which TiN nanoparticles and CrN th...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2021-12-01
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| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523921000957 |