Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing
Anomaly detection is essential for the monitoring and improvement of product quality in manufacturing processes. In the case of semiconductor manufacturing, where large amounts of time series data from equipment sensors are rapidly accumulated, identifying anomalous signals within this data presents...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2023-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10318085/ |