Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing

Anomaly Detection in Time Series Data and its Application to Semiconductor Manufacturing

Anomaly detection is essential for the monitoring and improvement of product quality in manufacturing processes. In the case of semiconductor manufacturing, where large amounts of time series data from equipment sensors are rapidly accumulated, identifying anomalous signals within this data presents...

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Bibliographic Details
Main Authors:	Rakhoon Hwang, Seungtae Park, Youngwook Bin, Hyung Ju Hwang
Format:	Article
Language:	English
Published:	IEEE 2023-01-01
Series:	IEEE Access
Subjects:	Anomaly detection fault detection and diagnosis multivariate time series data semiconductor manufacturing unsupervised learning
Online Access:	https://ieeexplore.ieee.org/document/10318085/

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