Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress

The failure behavior and the corresponding physical mechanism of the AlGaN/GaN high electron mobility transistors (HEMTs) under transmission line pulse (TLP) stress were investigated in this paper. The result shows that the output and transfer characteristics of the AlGaN/GaN HEMTs after 90 cycles b...

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Main Authors: Y. Ren, Y. Q. Chen, C. Liu, X. B. Xu, R. Gao, D. Y. Lei, P. Lai, Y. Huang, J. He
Format: Article
Language:English
Published: IEEE 2021-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/9459154/
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author Y. Ren
Y. Q. Chen
C. Liu
X. B. Xu
R. Gao
D. Y. Lei
P. Lai
Y. Huang
J. He
author_facet Y. Ren
Y. Q. Chen
C. Liu
X. B. Xu
R. Gao
D. Y. Lei
P. Lai
Y. Huang
J. He
author_sort Y. Ren
collection DOAJ
description The failure behavior and the corresponding physical mechanism of the AlGaN/GaN high electron mobility transistors (HEMTs) under transmission line pulse (TLP) stress were investigated in this paper. The result shows that the output and transfer characteristics of the AlGaN/GaN HEMTs after 90 cycles begin to degrade by comparing with the fresh ones under 40 V TLP voltage, and the gate leakage current of the devices slightly increases. When the TLP voltage of 52 V was applied, a catastrophic failure occurs for the AlGaN/GaN HEMTs. Furthermore, the failure of the AlGaN/GaN HEMTs was located, and the micro-morphology of the abnormal spot was observed. The result shows that the gate metal was damaged due to the large TLP stress. The failure mechanism may be mainly attributed to the Joule heat that causes the high lattice temperature of 1160 K as well as the electric field, and it is higher than the melting point of Au (1064 K) in the gate metal (Au/Ti/Mo). The results may be useful in the design and application of electrostatic discharge (ESD) for AlGaN/GaN HEMTs.
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spelling doaj.art-44cb5ab49df6448fbb2cf60919b00b302022-12-21T22:16:24ZengIEEEIEEE Journal of the Electron Devices Society2168-67342021-01-01962863210.1109/JEDS.2021.30900919459154Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed StressY. Ren0Y. Q. Chen1https://orcid.org/0000-0001-6901-3000C. Liu2https://orcid.org/0000-0003-1829-0838X. B. Xu3https://orcid.org/0000-0003-3656-2489R. Gao4https://orcid.org/0000-0001-7400-3931D. Y. Lei5https://orcid.org/0000-0001-8935-649XP. Lai6Y. Huang7J. He8No.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaNo.5 Electronics Research Institute, Ministry of Industry and Information Technology Guangzhou, Guangdong, ChinaThe failure behavior and the corresponding physical mechanism of the AlGaN/GaN high electron mobility transistors (HEMTs) under transmission line pulse (TLP) stress were investigated in this paper. The result shows that the output and transfer characteristics of the AlGaN/GaN HEMTs after 90 cycles begin to degrade by comparing with the fresh ones under 40 V TLP voltage, and the gate leakage current of the devices slightly increases. When the TLP voltage of 52 V was applied, a catastrophic failure occurs for the AlGaN/GaN HEMTs. Furthermore, the failure of the AlGaN/GaN HEMTs was located, and the micro-morphology of the abnormal spot was observed. The result shows that the gate metal was damaged due to the large TLP stress. The failure mechanism may be mainly attributed to the Joule heat that causes the high lattice temperature of 1160 K as well as the electric field, and it is higher than the melting point of Au (1064 K) in the gate metal (Au/Ti/Mo). The results may be useful in the design and application of electrostatic discharge (ESD) for AlGaN/GaN HEMTs.https://ieeexplore.ieee.org/document/9459154/GaN HEMTfailuretransmission line pulse
spellingShingle Y. Ren
Y. Q. Chen
C. Liu
X. B. Xu
R. Gao
D. Y. Lei
P. Lai
Y. Huang
J. He
Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
IEEE Journal of the Electron Devices Society
GaN HEMT
failure
transmission line pulse
title Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
title_full Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
title_fullStr Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
title_full_unstemmed Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
title_short Gate Failure Behavior and Mechanism of AlGaN/GaN HEMTs Under Transmission Line Pulsed Stress
title_sort gate failure behavior and mechanism of algan gan hemts under transmission line pulsed stress
topic GaN HEMT
failure
transmission line pulse
url https://ieeexplore.ieee.org/document/9459154/
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