Theoretical Modeling of Piezoelectric Cantilever MEMS Loudspeakers
Piezoelectric microelectromechanical system (MEMS) loudspeakers have received extensive attention in recent years. In particular, the piezoelectric cantilever MEMS loudspeaker, which uses multilayer piezoelectric cantilever actuators (MPCAs), has attracted attention because of its small size, low co...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-07-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/14/6323 |