Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Experimental Study on Femtosecond Laser Processing Performance of Single-Crystal Silicon Carbide

Femtosecond laser processing technology offers a promising technique for the preparation of micro and nanostructures of single-crystal silicon carbide (SiC), thanks to its high precision and non-destructive processing. However, further research is needed to optimize processing parameters, as well as...

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Bibliographic Details
Main Authors: Ru Zhang, Quanjing Wang, Qingkui Chen, Aijun Tang, Wenbo Zhao
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Applied Sciences
Subjects:
femtosecond laser
silicon carbide
processing performance
Online Access:https://www.mdpi.com/2076-3417/13/13/7533

Internet

https://www.mdpi.com/2076-3417/13/13/7533

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