The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

The patterning toolbox FIB-o-mat: Exploiting the full potential of focused helium ions for nanofabrication

Focused beams of helium ions are a powerful tool for high-fidelity machining with spatial precision below 5 nm. Achieving such a high patterning precision over large areas and for different materials in a reproducible manner, however, is not trivial. Here, we introduce the Python toolbox FIB-o-mat f...

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Bibliographic Details
Main Authors: Victor Deinhart, Lisa-Marie Kern, Jan N. Kirchhof, Sabrina Juergensen, Joris Sturm, Enno Krauss, Thorsten Feichtner, Sviatoslav Kovalchuk, Michael Schneider, Dieter Engel, Bastian Pfau, Bert Hecht, Kirill I. Bolotin, Stephanie Reich, Katja Höflich
Format: Article
Language:English
Published: Beilstein-Institut 2021-04-01
Series:Beilstein Journal of Nanotechnology
Subjects:
automated patterning
focused he ion beam
graphene
magnetic multilayers
mechanical resonator
pattern generation
plasmonic antennas
two-dimensional materials
Online Access:https://doi.org/10.3762/bjnano.12.25

Internet

https://doi.org/10.3762/bjnano.12.25

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