Enhanced Conductivity and Microstructure in Highly Textured TiN1–x/c‑Al2O3 Thin Films

Bibliographic Details
Main Authors:	Alexander Zintler, Robert Eilhardt, Stefan Petzold, Sankaramangalam Ulhas Sharath, Enrico Bruder, Nico Kaiser, Lambert Alff, Leopoldo Molina-Luna
Format:	Article
Language:	English
Published:	American Chemical Society 2022-01-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.1c05505

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