Light and matter co-confined multi-photon lithography
Abstract Mask-free multi-photon lithography enables the fabrication of arbitrary nanostructures low cost and more accessible than conventional lithography. A major challenge for multi-photon lithography is to achieve ultra-high precision and desirable lateral resolution due to the inevitable optical...
| Հիմնական հեղինակներ: | , , , , , , , , , , , , |
|---|---|
| Ձևաչափ: | Հոդված |
| Լեզու: | English |
| Հրապարակվել է: |
Nature Portfolio
2024-03-01
|
| Շարք: | Nature Communications |
| Առցանց հասանելիություն: | https://doi.org/10.1038/s41467-024-46743-5 |