A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

Audio applications such as mobile phones, hearing aids, true wireless stereo earphones, and Internet of Things devices demand small size, high performance, and reduced cost. Microelectromechanical system (MEMS) capacitive microphones fulfill these requirements with improved reliability and specifica...

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Bibliographic Details
Main Authors: Shubham Shubham, Yoonho Seo, Vahid Naderyan, Xin Song, Anthony J. Frank, Jeremy Thomas Morley Greenham Johnson, Mark da Silva, Michael Pedersen
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
MEMS
capacitive microphone
finite element modeling
reduced order modeling
effective area
peripheral protrusion
Online Access:https://www.mdpi.com/2072-666X/13/1/22

Internet

https://www.mdpi.com/2072-666X/13/1/22

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