Influence of NiO ALD Coatings on the Field Emission Characteristic of CNT Arrays

Influence of NiO ALD Coatings on the Field Emission Characteristic of CNT Arrays

The paper presents a study of a large-area field emitter based on a composite of vertically aligned carbon nanotubes covered with a continuous and conformal layer of nickel oxide by the atomic layer deposition method. The arrays of carbon nanotubes were grown by direct current plasma-enhanced chemic...

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Bibliographic Details
Main Authors: Maksim A. Chumak, Leonid A. Filatov, Ilya S. Ezhov, Anatoly G. Kolosko, Sergey V. Filippov, Eugeni O. Popov, Maxim Yu. Maximov
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Nanomaterials
Subjects:
atomic layer deposition (ALD)
thin film structures
field emission cathode
composite structures
carbon nanotubes
direct current plasma-enhanced chemical vapor deposition (DC-PECVD)
Online Access:https://www.mdpi.com/2079-4991/12/19/3463

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https://www.mdpi.com/2079-4991/12/19/3463

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