Single-Ended Eddy Current Micro-Displacement Sensor with High Precision Based on Temperature Compensation
To measure the micro-displacement reliably with high precision, a single-ended eddy current sensor based on temperature compensation was studied in detail. At first, the principle of the eddy current sensor was introduced, and the manufacturing method of the probe was given. The overall design plan...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Jezik: | English |
| Izdano: |
MDPI AG
2024-03-01
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| Serija: | Micromachines |
| Teme: | |
| Online dostop: | https://www.mdpi.com/2072-666X/15/3/366 |