New Analytical Capacitance Modeling of the Perforated Switch Considering the Fringing Effect

New Analytical Capacitance Modeling of the Perforated Switch Considering the Fringing Effect

Movable suspended microstructures are common features of sensors and devices in the field of micro electro mechanical systems (MEMS). This paper addresses the study of approach to model the capacitance for the crab-type meander-based RF MEMS shunt switch with etching holes on the beam. The presented...

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Bibliographic Details
Main Authors: K. Srinivasa Rao, B. V. S. Sailaja, K. Girija Sravani, K. V. Vineetha, P. Ashok Kumar, D. Prathyusha, G. Sai Lakshmi, C. H. Gopi Chand, Koushik Guha
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Access
Subjects:
Fixed-fixed beam
etching holes
ligament efficiency
RF MEMS
parallel-plate capacitance
fringing-field capacitance
Online Access:https://ieeexplore.ieee.org/document/8657690/

Internet

https://ieeexplore.ieee.org/document/8657690/

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