Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer

A new method based on the interferometric pseudo-lateral-shearing method is proposed to evaluate the pitch variation of a large-scale planar variable-line-spacing (VLS) grating. In the method, wavefronts of the first-order diffracted beams from a planar VLS grating are measured by a commercial Fizea...

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Bibliographic Details
Main Authors: Xin Xiong, Chenguang Yin, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Hideaki Tamiya, Wei Gao
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Sensors
Subjects:
variable-line-spacing grating
diffraction gratings
self-calibration
optical encoder
interferometry
interferometric pseudo-lateral-shearing method
Online Access:https://www.mdpi.com/1424-8220/22/23/9348

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https://www.mdpi.com/1424-8220/22/23/9348

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