Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal−insulator−semiconductor (MIS) structure type Pd−SiO<sub>2</sub>−Si, was developed and manufactured. It was expe...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-03-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/5/1514 |