Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor

A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal&#8722;insulator&#8722;semiconductor (MIS) structure type Pd&#8722;SiO<sub>2</sub>&#8722;Si, was developed and manufactured. It was expe...

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Main Authors: Nikolay Samotaev, Artur Litvinov, Maya Etrekova, Konstantin Oblov, Dmitrii Filipchuk, Alexey Mikhailov
Format: Article
Language:English
Published: MDPI AG 2020-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/5/1514
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author Nikolay Samotaev
Artur Litvinov
Maya Etrekova
Konstantin Oblov
Dmitrii Filipchuk
Alexey Mikhailov
author_facet Nikolay Samotaev
Artur Litvinov
Maya Etrekova
Konstantin Oblov
Dmitrii Filipchuk
Alexey Mikhailov
author_sort Nikolay Samotaev
collection DOAJ
description A prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal&#8722;insulator&#8722;semiconductor (MIS) structure type Pd&#8722;SiO<sub>2</sub>&#8722;Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 &#215; 10<sup>&#8722;9</sup> g, which corresponds to concentration from 10<sup>&#8722;11</sup> g/cm<sup>3</sup> to 10<sup>&#8722;12</sup> g/cm<sup>3</sup>. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.
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spelling doaj.art-461c7d63bedc4be0a3453afc25b2bc2e2022-12-22T01:57:19ZengMDPI AGSensors1424-82202020-03-01205151410.3390/s20051514s20051514Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS SensorNikolay Samotaev0Artur Litvinov1Maya Etrekova2Konstantin Oblov3Dmitrii Filipchuk4Alexey Mikhailov5National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, RussiaNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, RussiaNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, RussiaNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, RussiaNational Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe hwy 31, 115409 Moscow, Russia“INKRAM” LLC Research and Production Company (“Inkram” RPC LLC), Mikhalkovskaya Street 63 “Б”, Bldg. 1, Floor 3, Premise VII, 125438 Moscow, RussiaA prototype of a nitro compound vapor and trace detector, which uses the pyrolysis method and a capacitive gas sensor based on the metal&#8722;insulator&#8722;semiconductor (MIS) structure type Pd&#8722;SiO<sub>2</sub>&#8722;Si, was developed and manufactured. It was experimentally established that the detection limit of trinitrotoluene trace for the detector prototype is 1 &#215; 10<sup>&#8722;9</sup> g, which corresponds to concentration from 10<sup>&#8722;11</sup> g/cm<sup>3</sup> to 10<sup>&#8722;12</sup> g/cm<sup>3</sup>. The prototype had a response time of no more than 30 s. The possibility of further improving the characteristics of the prototype detector by reducing the overall dimensions and increasing the sensitivity of the MIS sensors is shown.https://www.mdpi.com/1424-8220/20/5/1514field effect gas sensormis structure type pd–sno<sub>2</sub>–sio<sub>2</sub>–sino<sub>2</sub> gas detection in ppb levelpyrolysis of nitro compound vapor
spellingShingle Nikolay Samotaev
Artur Litvinov
Maya Etrekova
Konstantin Oblov
Dmitrii Filipchuk
Alexey Mikhailov
Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
Sensors
field effect gas sensor
mis structure type pd–sno<sub>2</sub>–sio<sub>2</sub>–si
no<sub>2</sub> gas detection in ppb level
pyrolysis of nitro compound vapor
title Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
title_full Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
title_fullStr Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
title_full_unstemmed Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
title_short Prototype of Nitro Compound Vapor and Trace Detector Based on a Capacitive MIS Sensor
title_sort prototype of nitro compound vapor and trace detector based on a capacitive mis sensor
topic field effect gas sensor
mis structure type pd–sno<sub>2</sub>–sio<sub>2</sub>–si
no<sub>2</sub> gas detection in ppb level
pyrolysis of nitro compound vapor
url https://www.mdpi.com/1424-8220/20/5/1514
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