Enhancement of Porous Silicon Formation by Using Laser Irradiation
In this work porous silicon where prepared by chemical etching assisted with laser. The structural and optical properties of porous silicon are investigated using atomic force microscopy (AFM) and FTIR spectroscope. FTIR spectrum exhibit the formation of SiHx (x=1,2) and Si-O bonds. The atomic force...
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Format: | Article |
Language: | English |
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Unviversity of Technology- Iraq
2013-03-01
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Series: | Engineering and Technology Journal |
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Online Access: | https://etj.uotechnology.edu.iq/article_84128_c255878c61743ce2f40ed660263cbc95.pdf |