Development of system to grow ZnO films by plasma assisted reactive evaporation with improved thickness homogeneity for using in solar cells
This paper focuses on the development and evaluation of an automated system for the deposition of ZnO thin films with suitable properties to be used in solar cells, using the plasma assisted reactive evaporation (PARE) method. A description is made of both the electronic system developed and the Zn...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-07-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785422007621 |