Modeling and Analysis of a Closed-Loop System for High-Q MEMS Accelerometer Sensor
High-Q sensing element is desirable for high performance while makes the loop control a great challenge. This paper presents a closed-loop system for high-Q capacitive MEMS accelerometer which has achieved loop control effectively. The proportional-derivative(PD)control is developed in the system to...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2018-01-01
|
| Series: | MATEC Web of Conferences |
| Online Access: | https://doi.org/10.1051/matecconf/201816005008 |