Helium ion microscopy for low-damage characterization and sub-10 nm nanofabrication
Abstract This review introduces the technique of helium ion microscopy along with some unique applications of this technology in the fields of electronics and biology, as performed at the National Institute of Advanced Industrial Science and Technology, Japan, over the last several years. Observatio...
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| Format: | Article |
| Language: | English |
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Springer
2022-07-01
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| Series: | AAPPS Bulletin |
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| Online Access: | https://doi.org/10.1007/s43673-022-00050-7 |