Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications
Now a days MEMS based for biomedical applications with high performance parameters like sensitivity and linearity are required for low pressure range.The low-pressure range (1–5 kPa) is a significant range that comprises intra-body pressures like intracranial pressure (ICP) and intraocular pressure...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917422001568 |