Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications
Now a days MEMS based for biomedical applications with high performance parameters like sensitivity and linearity are required for low pressure range.The low-pressure range (1–5 kPa) is a significant range that comprises intra-body pressures like intracranial pressure (ICP) and intraocular pressure...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2022-12-01
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| Series: | Measurement: Sensors |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2665917422001568 |
| _version_ | 1811197466963345408 |
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| author | Rekha Devi Sandeep Singh Gill Balwinder Singh |
| author_facet | Rekha Devi Sandeep Singh Gill Balwinder Singh |
| author_sort | Rekha Devi |
| collection | DOAJ |
| description | Now a days MEMS based for biomedical applications with high performance parameters like sensitivity and linearity are required for low pressure range.The low-pressure range (1–5 kPa) is a significant range that comprises intra-body pressures like intracranial pressure (ICP) and intraocular pressure (IOP).A lot of work on piezoresistive pressure sensor with different shapes diaphragms like squared, circular and rectangular has been carried out.In MEMS Piezoresistive Pressure sensors the most important pressure-sensitive component is the squared diaphragm. The performance of the Micro-sensor is directly determined, under uniform applied pressure with its deformation. In pressure sensor design, the accurate relationship between pressure and deformation plays a very consequence role. In this paper, squared diaphragm of silicon material is modeled and simulate using the analytical equations for a thin plate, along with the theory of small-deflection to providing quick insight regarding important parameter like stress and Deformation for the operating pressure range of 0 kPa–5 kPa. The mechanical behavior of micro-machined silicon diaphragm in terms of stress and deflection generation has been simulated.The piezoresistivity principle is used to assess the sensor's sensitivity. The mechanical change in the thin diaphragm in the form of deflection and stress is calculated and presented. In this Modeling both the analytical and simulated(FEA) results for the performance parameters such as stress, Deflection and the output voltage is computed and compared, it is found that the error between analytical and simulation results is no more than 5.6–6.5%. |
| first_indexed | 2024-04-12T01:14:17Z |
| format | Article |
| id | doaj.art-46d6312bc21342f0a01c7f3e11caac77 |
| institution | Directory Open Access Journal |
| issn | 2665-9174 |
| language | English |
| last_indexed | 2024-04-12T01:14:17Z |
| publishDate | 2022-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Measurement: Sensors |
| spelling | doaj.art-46d6312bc21342f0a01c7f3e11caac772022-12-22T03:54:00ZengElsevierMeasurement: Sensors2665-91742022-12-0124100522Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applicationsRekha Devi0Sandeep Singh Gill1Balwinder Singh2IKG Punjab Technical University, Jalandhar, India; Chandigarh University, Mohali, India; Corresponding author. IKG Punjab Technical University, Jalandhar, India.National Institute for Technical Teachers Training & Research Chandigarh, IndiaCentre for Development of Advanced Computing, Mohali, IndiaNow a days MEMS based for biomedical applications with high performance parameters like sensitivity and linearity are required for low pressure range.The low-pressure range (1–5 kPa) is a significant range that comprises intra-body pressures like intracranial pressure (ICP) and intraocular pressure (IOP).A lot of work on piezoresistive pressure sensor with different shapes diaphragms like squared, circular and rectangular has been carried out.In MEMS Piezoresistive Pressure sensors the most important pressure-sensitive component is the squared diaphragm. The performance of the Micro-sensor is directly determined, under uniform applied pressure with its deformation. In pressure sensor design, the accurate relationship between pressure and deformation plays a very consequence role. In this paper, squared diaphragm of silicon material is modeled and simulate using the analytical equations for a thin plate, along with the theory of small-deflection to providing quick insight regarding important parameter like stress and Deformation for the operating pressure range of 0 kPa–5 kPa. The mechanical behavior of micro-machined silicon diaphragm in terms of stress and deflection generation has been simulated.The piezoresistivity principle is used to assess the sensor's sensitivity. The mechanical change in the thin diaphragm in the form of deflection and stress is calculated and presented. In this Modeling both the analytical and simulated(FEA) results for the performance parameters such as stress, Deflection and the output voltage is computed and compared, it is found that the error between analytical and simulation results is no more than 5.6–6.5%.http://www.sciencedirect.com/science/article/pii/S2665917422001568Pressure sensorSquared diaphragmPiezorestivityDeflectionThin plate |
| spellingShingle | Rekha Devi Sandeep Singh Gill Balwinder Singh Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications Measurement: Sensors Pressure sensor Squared diaphragm Piezorestivity Deflection Thin plate |
| title | Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications |
| title_full | Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications |
| title_fullStr | Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications |
| title_full_unstemmed | Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications |
| title_short | Quantitative analysis of MEMS piezoresistive squared diaphragm pressure sensor for biomedical applications |
| title_sort | quantitative analysis of mems piezoresistive squared diaphragm pressure sensor for biomedical applications |
| topic | Pressure sensor Squared diaphragm Piezorestivity Deflection Thin plate |
| url | http://www.sciencedirect.com/science/article/pii/S2665917422001568 |
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