Design and Performance Enhancement of a Piezoelectric Micromachined Ultrasonic Transducer Based on NBBT Lead-Free Piezoelectric Single-Crystal Thin Film

Design and Performance Enhancement of a Piezoelectric Micromachined Ultrasonic Transducer Based on NBBT Lead-Free Piezoelectric Single-Crystal Thin Film

Piezoelectric micromachined ultrasonic transducers (PMUTs) have attracted widespread attention due to their high performance, miniaturization, and easy integration with semiconductor processes. In this paper, a PMUT device based on high-performance and lead-free Na<sub>0.5</sub>Bi<sub...

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Bibliographic Details
Main Authors: Yaqi Liu, Qiaozhen Zhang, Mingzhu Chen, Xiaonan Liu, Jiye Yang, Feifei Wang, Yanxue Tang, Bin Miao, Jiadong Li, Xiangyong Zhao
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Crystals
Subjects:
NBBT piezoelectric single crystal thin film
piezoelectric micromachined ultrasonic transducer
high frequency
lead-free
Online Access:https://www.mdpi.com/2073-4352/13/9/1394

Internet

https://www.mdpi.com/2073-4352/13/9/1394

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