Etching Rate Enhancement of Porous Silicon Produced by Lasers
Two laser systems work with different operational modes have been used to produce silicon nanostructure surfaces. Pulsed Nd:YAG laser has been employed to produce silicon textured surface which containing nano/microstructures. Effects of laser energies (80 – 200) mj were examined to produce surface...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2012-02-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_25917_2946256f85b18e60345814117461fab9.pdf |