A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator
Demands for three-dimensional nano-positioning are increasing in a wide range of industries. In order to meet such demands, it is necessary to realize a stable long-stroke vertical nano-motion. In long-stroke vertical motion control, the minimization of gravity load is one of the most important issu...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2008-06-01
|
| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/3/2_3_356/_pdf/-char/en |