Demonstration of ferroelectricity in PLD grown HfO<sub>2</sub>-ZrO<sub>2</sub> nanolaminates

Demonstration of ferroelectricity in PLD grown HfO<sub>2</sub>-ZrO<sub>2</sub> nanolaminates

Ferroelectricity is demonstrated for the first time in Si(100)/SiO<sub>2</sub>/TiN/HfO<sub>2</sub>-ZrO<sub>2</sub>/TiN stack using pulsed laser deposition (PLD) and the effects of temperatures, partial oxygen pressures, and thickness for the stabilization of the f...

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Bibliographic Details
Main Authors: Sree Sourav Das, Zach Fox, Md Dalim Mia, Brian C Samuels, Rony Saha, Ravi Droopad
Format: Article
Language:English
Published: AIMS Press 2023-03-01
Series:AIMS Materials Science
Subjects:
ferroelectricity
pulsed laser deposition
remnant polarization
leakage current
endurance
x-ray diffraction
Online Access:https://www.aimspress.com/article/doi/10.3934/matersci.2023018?viewType=HTML

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https://www.aimspress.com/article/doi/10.3934/matersci.2023018?viewType=HTML

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