Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

Micro-Grippers with Femtosecond-Laser Machined In-Plane Agonist-Antagonist SMA Actuators Integrated on Wafer-Level by Galvanic Riveting

In-plane shape memory alloy (SMA) actuators operated in agonist-antagonist mode are integrated on silicon micro-grippers. The actuator elements are cut out of sheet material in a femtosecond laser ablation process. The assembly process is carried out on wafer-level, and the fixation realized by galv...

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Bibliographic Details
Main Authors: Mayra Garcés-Schröder, Lars Hecht, Anke Vierheller, Monika Leester-Schädel, Markus Böl, Andreas Dietzel
Format: Article
Language:English
Published: MDPI AG 2017-08-01
Series:Proceedings
Subjects:
SMA
actuator
micro-gripper
femtosecond laser
Online Access:https://www.mdpi.com/2504-3900/1/4/385

Internet

https://www.mdpi.com/2504-3900/1/4/385

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