Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO<sub>3</sub> Thin Film

Spurious-Free Shear Horizontal Wave Resonators Based on 36Y-Cut LiNbO<sub>3</sub> Thin Film

This article presents lithium niobate (LiNbO<sub>3</sub>) based on shear horizontal (SH0) resonators, utilizing a suspended structure, for radio frequency (RF) applications. It demonstrates the design, analysis, and fabrication of SH0 resonators based on a 36Y-cut LiNbO<sub>3</s...

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Bibliographic Details
Main Authors: Yushuai Liu, Kangfu Liu, Jiawei Li, Yang Li, Tao Wu
Format: Article
Language:English
Published: MDPI AG 2024-03-01
Series:Micromachines
Subjects:
lithium niobate (LiNbO<sub>3</sub>)
resonator
high electromechanical coupling coefficient
shear horizontal wave
Online Access:https://www.mdpi.com/2072-666X/15/4/477

Internet

https://www.mdpi.com/2072-666X/15/4/477

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