A Rotary-Linear Ultrasonic Motor Using MnO<sub>2</sub>-Doped (Ba<sub>0.97</sub>Ca<sub>0.03</sub>)(Ti<sub>0.96</sub>Sn<sub>0.005</sub>Hf<sub>0.035</sub>)O<sub>3</sub> Lead-Free Piezoelectric Ceramics with Improved Curie Temperature and Temperature Stability

In this work, a cylindrical lead-free rotary-linear ultrasonic motor was attached to piezoelectric plates of MnO<sub>2</sub>-doped (Ba<sub>0.97</sub>Ca<sub>0.03</sub>)(Ti<sub>0.96</sub>Sn<sub>0.005</sub>Hf<sub>0.035</sub>)O<s...

Full description

Bibliographic Details
Main Authors: Cheng-Che Tsai, Sheng-Yuan Chu, Wei-Hsiang Chao, Cheng-Shong Hong
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Actuators
Subjects:
Online Access:https://www.mdpi.com/2076-0825/11/9/248