Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module
This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the phot...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
University North
2022-01-01
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| Series: | Tehnički Glasnik |
| Subjects: | |
| Online Access: | https://hrcak.srce.hr/file/404733 |