Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module
This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the phot...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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University North
2022-01-01
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| Series: | Tehnički Glasnik |
| Subjects: | |
| Online Access: | https://hrcak.srce.hr/file/404733 |
| _version_ | 1818250197704114176 |
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| author | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang Ze-Fong You |
| author_facet | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang Ze-Fong You |
| author_sort | Syuan-Cheng Chang |
| collection | DOAJ |
| description | This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the photoelectronic inspection module in a three DOF measurement system share the same light source, and the two structures are used to measure linear displacement and straightness errors. The experimental results are utilized to calculate the relevant error parameters according to ISO standards and numerical analysis. They show that after the machine error compensation, the positioning deviation of the system is reduced from 55 μm to 19 μm, corresponding to the reduction of 65%. The accuracy is promoted from 65 μm to 31 μm, about the improvement of 52%. The horizontal and vertical straightness errors of the machine are 4.30 μm and 5.71 μm respectively. |
| first_indexed | 2024-12-12T15:48:34Z |
| format | Article |
| id | doaj.art-47f2f078a124425e9961a3eee1a61305 |
| institution | Directory Open Access Journal |
| issn | 1846-6168 1848-5588 |
| language | English |
| last_indexed | 2024-12-12T15:48:34Z |
| publishDate | 2022-01-01 |
| publisher | University North |
| record_format | Article |
| series | Tehnički Glasnik |
| spelling | doaj.art-47f2f078a124425e9961a3eee1a613052022-12-22T00:19:41ZengUniversity NorthTehnički Glasnik1846-61681848-55882022-01-01163420425Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic ModuleSyuan-Cheng Chang0Chung-Ping Chang1Yung-Cheng Wang2Ze-Fong You3National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.National Chiayi University, 300 Syuefu Road, Chiayi 600355, Taiwan, R.O.C.National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.National Yunlin University of Science and Technology, 123 University Road, Section 3, Douliou, Yunlin 64002, Taiwan, R.O.C.This research develops a three degrees of freedom (DOF) measurement system by integrating Fabry-Perot interferometer and photoelectronic inspection module to determine linear displacement, horizontal and vertical straightness geometric error parameters simultaneously. The interferometer and the photoelectronic inspection module in a three DOF measurement system share the same light source, and the two structures are used to measure linear displacement and straightness errors. The experimental results are utilized to calculate the relevant error parameters according to ISO standards and numerical analysis. They show that after the machine error compensation, the positioning deviation of the system is reduced from 55 μm to 19 μm, corresponding to the reduction of 65%. The accuracy is promoted from 65 μm to 31 μm, about the improvement of 52%. The horizontal and vertical straightness errors of the machine are 4.30 μm and 5.71 μm respectively.https://hrcak.srce.hr/file/404733interferometerlinear displacementoptoelectronic modulestraightness measurement |
| spellingShingle | Syuan-Cheng Chang Chung-Ping Chang Yung-Cheng Wang Ze-Fong You Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module Tehnički Glasnik interferometer linear displacement optoelectronic module straightness measurement |
| title | Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module |
| title_full | Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module |
| title_fullStr | Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module |
| title_full_unstemmed | Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module |
| title_short | Linear Displacement and Straightness Measurement by Fabry-Perot Interferometer Integrated with an Optoelectronic Module |
| title_sort | linear displacement and straightness measurement by fabry perot interferometer integrated with an optoelectronic module |
| topic | interferometer linear displacement optoelectronic module straightness measurement |
| url | https://hrcak.srce.hr/file/404733 |
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