Effect of CH<sub>4</sub> Flow Rate on the Tribological Behaviors of TiCN Films against Si<sub>3</sub>N<sub>4</sub> Ceramic and Steel Ball

Effect of CH<sub>4</sub> Flow Rate on the Tribological Behaviors of TiCN Films against Si<sub>3</sub>N<sub>4</sub> Ceramic and Steel Ball

Control of the structural, mechanical and tribological properties of TiCN films play an important role in its numerous applications, including the cutting tools, mechanical components, aeronautical and biomedical engineering industries. Direct-current magnetron sputtering (DCMS) system was applied t...

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Bibliographic Details
Main Authors: Yanhong Lyu, Jianyun Zheng, Huilian Sun, Xinrong Deng, Yang Liu, Qiaoyu Zhang
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Lubricants
Subjects:
TiCN film
direct-current magnetron sputtering
CH<sub>4</sub> flow rate
tribological behavior
Online Access:https://www.mdpi.com/2075-4442/11/5/209

Internet

https://www.mdpi.com/2075-4442/11/5/209

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