Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film
A technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was ana...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IFSA Publishing, S.L.
2019-01-01
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| Series: | Sensors & Transducers |
| Subjects: | |
| Online Access: | https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3053.pdf |