Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film
A technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was ana...
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| Format: | Article |
| Language: | English |
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IFSA Publishing, S.L.
2019-01-01
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| Series: | Sensors & Transducers |
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| Online Access: | https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3053.pdf |
| _version_ | 1797776369854185472 |
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| author | Vladimir AROUTIOUNIAN Valeri ARAKELYAN Mikayel ALEKSANYAN Gohar SHAHNAZARYAN Artak SAYUNTS Berndt JOOST |
| author_facet | Vladimir AROUTIOUNIAN Valeri ARAKELYAN Mikayel ALEKSANYAN Gohar SHAHNAZARYAN Artak SAYUNTS Berndt JOOST |
| author_sort | Vladimir AROUTIOUNIAN |
| collection | DOAJ |
| description | A technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was analyzed. The thickness of the deposited doped metal oxide film was measured. The morphology of the deposited Co-doped SnO2 film was studied by scanning electron microscopy. The sensor sensitivity to the different concentrations of hydrogen peroxide vapors was measured at different operating temperatures. It was found that the Co- doped SnO2 sensor exhibit a sufficient sensitivity to very low concentration of hydrogen peroxide vapors (875 ppb) at the operating temperature of 100 °C. It exhibits a sensitivity at low operating temperature (25 °C) when exposed to hydrogen peroxide vapors with a concentration greater than 3.5 ppm. The optimal performance was observed at the operating temperature of 150 °C. The sensor made of SnO2 had potential application in real samples for the implementation of medical diagnostic apparatus for use in determining low concentration of hydrogen peroxide vapors. |
| first_indexed | 2024-03-12T22:48:56Z |
| format | Article |
| id | doaj.art-4887195d34134ef7b68169f98c877756 |
| institution | Directory Open Access Journal |
| issn | 2306-8515 1726-5479 |
| language | English |
| last_indexed | 2024-03-12T22:48:56Z |
| publishDate | 2019-01-01 |
| publisher | IFSA Publishing, S.L. |
| record_format | Article |
| series | Sensors & Transducers |
| spelling | doaj.art-4887195d34134ef7b68169f98c8777562023-07-20T15:19:02ZengIFSA Publishing, S.L.Sensors & Transducers2306-85151726-54792019-01-012291Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 FilmVladimir AROUTIOUNIAN0Valeri ARAKELYAN1Mikayel ALEKSANYAN2Gohar SHAHNAZARYAN3Artak SAYUNTS4Berndt JOOST5Yerevan State University, Department of Physics of Semiconductors and MicroelectronicsYerevan State University, Department of Physics of Semiconductors and MicroelectronicsYerevan State University, Department of Physics of Semiconductors and MicroelectronicsYerevan State University, Department of Physics of Semiconductors and MicroelectronicsYerevan State University, Department of Physics of Semiconductors and MicroelectronicsInstitute for Pharmaceutical Technology, Fachhochschule Nordwestschweiz, Hochschule für Life SciencesA technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was analyzed. The thickness of the deposited doped metal oxide film was measured. The morphology of the deposited Co-doped SnO2 film was studied by scanning electron microscopy. The sensor sensitivity to the different concentrations of hydrogen peroxide vapors was measured at different operating temperatures. It was found that the Co- doped SnO2 sensor exhibit a sufficient sensitivity to very low concentration of hydrogen peroxide vapors (875 ppb) at the operating temperature of 100 °C. It exhibits a sensitivity at low operating temperature (25 °C) when exposed to hydrogen peroxide vapors with a concentration greater than 3.5 ppm. The optimal performance was observed at the operating temperature of 150 °C. The sensor made of SnO2 had potential application in real samples for the implementation of medical diagnostic apparatus for use in determining low concentration of hydrogen peroxide vapors.https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3053.pdfsensornanostructured filmsemiconductordoped metal oxidehydrogen peroxide vapors |
| spellingShingle | Vladimir AROUTIOUNIAN Valeri ARAKELYAN Mikayel ALEKSANYAN Gohar SHAHNAZARYAN Artak SAYUNTS Berndt JOOST Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film Sensors & Transducers sensor nanostructured film semiconductor doped metal oxide hydrogen peroxide vapors |
| title | Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film |
| title_full | Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film |
| title_fullStr | Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film |
| title_full_unstemmed | Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film |
| title_short | Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film |
| title_sort | study of hydrogen peroxide vapors sensor made of nanostructured co doped sno2 film |
| topic | sensor nanostructured film semiconductor doped metal oxide hydrogen peroxide vapors |
| url | https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3053.pdf |
| work_keys_str_mv | AT vladimiraroutiounian studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film AT valeriarakelyan studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film AT mikayelaleksanyan studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film AT goharshahnazaryan studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film AT artaksayunts studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film AT berndtjoost studyofhydrogenperoxidevaporssensormadeofnanostructuredcodopedsno2film |