Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film

Study of Hydrogen Peroxide Vapors Sensor Made of Nanostructured Co-doped SnO2 Film

A technology was developed for manufacturing the hydrogen peroxide vapors solid-state semiconductor sensor. Gas sensitive nanostructured films made of doped metal oxide SnO2 were manufactured by the high-frequency magnetron sputtering method. The chemical composition of prepared SnO2 targets was ana...

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Bibliographic Details
Main Authors:	Vladimir AROUTIOUNIAN, Valeri ARAKELYAN, Mikayel ALEKSANYAN, Gohar SHAHNAZARYAN, Artak SAYUNTS, Berndt JOOST
Format:	Article
Language:	English
Published:	IFSA Publishing, S.L. 2019-01-01
Series:	Sensors & Transducers
Subjects:	sensor nanostructured film semiconductor doped metal oxide hydrogen peroxide vapors
Online Access:	https://sensorsportal.com/HTML/DIGEST/january_2019/Vol_229/P_3053.pdf

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