Microfabrication of sealable microcell array with ultrathin metal-graphene membrane

Microfabrication of sealable microcell array with ultrathin metal-graphene membrane

A significant challenge in quasi-two dimensional (2D) materials applications is the fabrication of large, suspended layers. This issue is particularly critical when the fabrication of closed cells is required, for example in in-operando x-ray photoemission spectroscopy (XPS) or transmission electron...

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Bibliographic Details
Main Authors: Erik Betz-Güttner, Simone Dal Zilio, Marco Lazzarino
Format: Article
Language:English
Published: Elsevier 2022-06-01
Series:Micro and Nano Engineering
Subjects:
Microfabrication
Ultrathin films
Graphene
MEMS
Mechanical sensor
MGNC
Online Access:http://www.sciencedirect.com/science/article/pii/S259000722200017X

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http://www.sciencedirect.com/science/article/pii/S259000722200017X

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