An Artificial-Intelligence-Driven Predictive Model for Surface Defect Detections in Medical MEMS
With the advancement of miniaturization in electronics and the ubiquity of micro-electro-mechanical systems (MEMS) in different applications including computing, sensing and medical apparatus, the importance of increasing production yields and ensuring the quality standard of products has become an...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/18/6141 |