Structure-Size Optimization and Fabrication of 3.7 GHz Film Bulk Acoustic Resonator Based on AlN Thin Film

Structure-Size Optimization and Fabrication of 3.7 GHz Film Bulk Acoustic Resonator Based on AlN Thin Film

Traditional radio frequency filters cannot meet the demands of miniaturization, high frequency operation, integration, and broadband capacity in new-generation communication system owing to their larger volumes. A thin film bulk acoustic resonator (FBAR) is therefore suggested as an optimum solution...

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Bibliographic Details
Main Authors: Pingying Jiang, Shiping Mao, Zaifang An, Chunlong Fei, Lifei Lou, Zhaoxi Li, Tianlong Zhao, Shiyi Jiang, Yintang Yang
Format: Article
Language:English
Published: Frontiers Media S.A. 2021-10-01
Series:Frontiers in Materials
Subjects:
FBAR
effective electromechanical coupling coefficient
AlN thin film
apodization
spurious resonance
Online Access:https://www.frontiersin.org/articles/10.3389/fmats.2021.731611/full

Internet

https://www.frontiersin.org/articles/10.3389/fmats.2021.731611/full

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