Data-driven solutions of ill-posed inverse problems arising from doping reconstruction in semiconductors
ABSTRACTThe non-destructive estimation of doping concentrations in semiconductor devices is of paramount importance for many applications ranging from crystal growth to defect and inhomogeneity detection. A number of technologies (such as LBIC, EBIC and LPS) have been developed which allow the detec...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
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| Series: | Applied Mathematics in Science and Engineering |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/27690911.2024.2323626 |