A novel method to design and evaluate artificial neural network for thin film thickness measurement traceable to the length standard
Abstract The artificial neural networks (ANNs) have been often used for thin-film thickness measurement, whose performance evaluations were only conducted at the level of simple comparisons with the existing analysis methods. However, it is not an easy and simple way to verify the reliability of an...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-02-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-06247-y |