3D heterostructures and systems for novel MEMS/NEMS
In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices...
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2009-01-01
|
| Series: | Science and Technology of Advanced Materials |
| Subjects: | |
| Online Access: | http://www.iop.org/EJ/abstract/1468-6996/10/3/034502 |