3D heterostructures and systems for novel MEMS/NEMS
In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2009-01-01
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| Series: | Science and Technology of Advanced Materials |
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| Online Access: | http://www.iop.org/EJ/abstract/1468-6996/10/3/034502 |
| _version_ | 1818481951267356672 |
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| author | Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov |
| author_facet | Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov |
| author_sort | Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov |
| collection | DOAJ |
| description | In this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties. |
| first_indexed | 2024-12-10T11:41:50Z |
| format | Article |
| id | doaj.art-4a177224b9c544a2b3eea465a1360166 |
| institution | Directory Open Access Journal |
| issn | 1468-6996 1878-5514 |
| language | English |
| last_indexed | 2024-12-10T11:41:50Z |
| publishDate | 2009-01-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Science and Technology of Advanced Materials |
| spelling | doaj.art-4a177224b9c544a2b3eea465a13601662022-12-22T01:50:13ZengTaylor & Francis GroupScience and Technology of Advanced Materials1468-69961878-55142009-01-011030345023D heterostructures and systems for novel MEMS/NEMSVictor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich KopylovIn this review, we consider the application of solid micro- and nanostructures of various shapes as building blocks for micro-electro-mechanical or nano-electro-mechanical systems (MEMS/NEMS). We provide examples of practical applications of structures created by MEMS/NEMS fabrication. Novel devices are briefly described, such as a high-power electrostatic nanoactuator, a fast-response tubular anemometer for measuring gas and liquid flows, a nanoprinter, a nanosyringe and optical MEMS/NEMS. The prospects are described for achieving NEMS with tunable quantum properties.http://www.iop.org/EJ/abstract/1468-6996/10/3/034502micro-electro-mechanical systems (MEMS)nano-electro-mechanical systems (NEMS)MEMS/NEMS heterostructures |
| spellingShingle | Victor Yakovlevich Prinz, Vladimir Alexandrovich Seleznev, Alexander Victorovich Prinz and Alexander Vladimirovich Kopylov 3D heterostructures and systems for novel MEMS/NEMS Science and Technology of Advanced Materials micro-electro-mechanical systems (MEMS) nano-electro-mechanical systems (NEMS) MEMS/NEMS heterostructures |
| title | 3D heterostructures and systems for novel MEMS/NEMS |
| title_full | 3D heterostructures and systems for novel MEMS/NEMS |
| title_fullStr | 3D heterostructures and systems for novel MEMS/NEMS |
| title_full_unstemmed | 3D heterostructures and systems for novel MEMS/NEMS |
| title_short | 3D heterostructures and systems for novel MEMS/NEMS |
| title_sort | 3d heterostructures and systems for novel mems nems |
| topic | micro-electro-mechanical systems (MEMS) nano-electro-mechanical systems (NEMS) MEMS/NEMS heterostructures |
| url | http://www.iop.org/EJ/abstract/1468-6996/10/3/034502 |
| work_keys_str_mv | AT victoryakovlevichprinzvladimiralexandrovichseleznevalexandervictorovichprinzandalexandervladimirovichkopylov 3dheterostructuresandsystemsfornovelmemsnems |