Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

Bibliographic Details
Main Authors: Hao Hong, Jiangtao Wei, Xin Lei, Haiyun Chen, Pasqualina M. Sarro, Guoqi Zhang, Zewen Liu
Format: Article
Language:English
Published: Nature Publishing Group 2023-07-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-023-00564-6

Internet

https://doi.org/10.1038/s41378-023-00564-6

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