Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries
SiO<sub>x</sub> thin films were prepared using magnetron sputtering with different O<sub>2</sub> flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 2...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
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| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/13/20/2749 |