Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries
SiO<sub>x</sub> thin films were prepared using magnetron sputtering with different O<sub>2</sub> flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 2...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-10-01
|
| Series: | Nanomaterials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2079-4991/13/20/2749 |
| _version_ | 1797572708714676224 |
|---|---|
| author | Natalia Herguedas Enrique Carretero |
| author_facet | Natalia Herguedas Enrique Carretero |
| author_sort | Natalia Herguedas |
| collection | DOAJ |
| description | SiO<sub>x</sub> thin films were prepared using magnetron sputtering with different O<sub>2</sub> flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 25 μm. By employing a multilayer model, the values of the complex refractive index that best fit the experimental transmission and reflection results were optimized using the Brendel–Bormann oscillator model. The results demonstrate the significance of selecting an appropriate range of O<sub>2</sub> flow rates to modify the SiO<sub>x</sub> stoichiometry, as well as how the refractive index values can be altered between those of Si and SiO<sub>2</sub> in the mid-infrared range. |
| first_indexed | 2024-03-10T21:00:32Z |
| format | Article |
| id | doaj.art-4b445a92cbde4f28a54351a8dd9e2608 |
| institution | Directory Open Access Journal |
| issn | 2079-4991 |
| language | English |
| last_indexed | 2024-03-10T21:00:32Z |
| publishDate | 2023-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Nanomaterials |
| spelling | doaj.art-4b445a92cbde4f28a54351a8dd9e26082023-11-19T17:35:32ZengMDPI AGNanomaterials2079-49912023-10-011320274910.3390/nano13202749Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different StoichiometriesNatalia Herguedas0Enrique Carretero1Departamento de Física Aplicada, Universidad de Zaragoza, C/Pedro Cerbuna, 12, 50009 Zaragoza, SpainDepartamento de Física Aplicada, Universidad de Zaragoza, C/Pedro Cerbuna, 12, 50009 Zaragoza, SpainSiO<sub>x</sub> thin films were prepared using magnetron sputtering with different O<sub>2</sub> flow rates on a silicon substrate. The samples were characterized using Fourier transform infrared spectroscopy in transmission and reflection, covering a spectral range of 5 to 25 μm. By employing a multilayer model, the values of the complex refractive index that best fit the experimental transmission and reflection results were optimized using the Brendel–Bormann oscillator model. The results demonstrate the significance of selecting an appropriate range of O<sub>2</sub> flow rates to modify the SiO<sub>x</sub> stoichiometry, as well as how the refractive index values can be altered between those of Si and SiO<sub>2</sub> in the mid-infrared range.https://www.mdpi.com/2079-4991/13/20/2749thin filmoptical propertiesmid-infraredsilicon oxiderefractive index |
| spellingShingle | Natalia Herguedas Enrique Carretero Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries Nanomaterials thin film optical properties mid-infrared silicon oxide refractive index |
| title | Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries |
| title_full | Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries |
| title_fullStr | Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries |
| title_full_unstemmed | Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries |
| title_short | Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries |
| title_sort | optical properties in mid infrared range of silicon oxide thin films with different stoichiometries |
| topic | thin film optical properties mid-infrared silicon oxide refractive index |
| url | https://www.mdpi.com/2079-4991/13/20/2749 |
| work_keys_str_mv | AT nataliaherguedas opticalpropertiesinmidinfraredrangeofsiliconoxidethinfilmswithdifferentstoichiometries AT enriquecarretero opticalpropertiesinmidinfraredrangeofsiliconoxidethinfilmswithdifferentstoichiometries |